Dittmar, Kornelia: search on Z-Library

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1

[IEEE 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Gainesville, FL, USA (2010.09.28-2010.10.1)] 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Characterization of nickel silicide transition behavior using non-contact CGS metrology

Owen, David M., Hebb, Jeff, Shetty, Shrinivas, Yun Wang,, Van Le,, Binder, Robert, Giedigkeit, Rainer, Waidmann, Stephan, Richter, Inka, Dittmar, Kornelia, Prinz, Hartmut, Weisheit, Martin

Year:

2010

Language:

english

File:

PDF, 1.21 MB

english, 2010

2

Physical failure analysis in semiconductor industry—challenges of the copper interconnect process

Ehrenfried Zschech, Eckhard Langer, Hans-Juergen Engelmann, Kornelia Dittmar

Journal:

Materials Science in Semiconductor Processing

Year:

2002

Language:

english

File:

PDF, 1.34 MB

english, 2002

3

In-situ analysis of introduced and indigenous Frankia populations in soil and root nodules obtained on Alnus glutinosa

Kornelia Zepp, Dittmar Hahn, Josef Zeyer

Journal:

Soil Biology and Biochemistry

Year:

1997

Language:

english

File:

PDF, 561 KB

english, 1997

4

[IEEE 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Gainesville, FL, USA (2010.09.28-2010.10.1)] 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Impact of dual beam laser spike annealing parameters on nickel silicide formation characteristics

Mileham, Jeffrey, Van Le,, Shetty, Shrinivas, Hebb, Jeff, Yun Wang,, Owen, Dave, Binder, Robert, Giedigkeit, Rainer, Waidmann, Stephan, Richter, Inka, Dittmar, Kornelia, Prinz, Hartmut, Weisheit, Ma

Year:

2010

Language:

english

File:

PDF, 1.25 MB

english, 2010

5

Novel enhanced stressors with graded encapsulated SiGe embedded in the source and drain areas

Andreas Naumann, Stephan Kronholz, Anthony Mowry, Ina Ostermay, Helmut Bierstedt, Bernhard Trui, Kornelia Dittmar, Peter Kücher, Johann W. Bartha, Thorsten Kammler

Journal:

Materials Science and Engineering: B

Year:

2008

Language:

english

File:

PDF, 347 KB

english, 2008

6

A Hypervariable 23S rRNA Region Provides a Discriminating Target for Specific Characterization of Uncultured and Cultured Frankia

Hönerlage, Wolfgang, Hahn, Dittmar, Zepp, Kornelia, Zeyer, Josef, Normand, Philippe

Journal:

Systematic and Applied Microbiology

Year:

1994

Language:

english

File:

PDF, 9.02 MB

english, 1994

7

Lithographic performance evaluation of a contaminated extreme ultraviolet mask after cleaning

George, Simi, Naulleau, Patrick, Okoroanyanwu, Uzodinma, Dittmar, Kornelia, Holfeld, Christian, Wüest, Andrea

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2010

Language:

english

File:

PDF, 1.44 MB

english, 2010

8

Investigation of ultrathin tantalum based diffusion barrier films using AES and TEM

Kornelia Dittmar, Hans-Jürgen Engelmann, M. Peikert, E. Wieser, J.V. Borany

Journal:

Applied Surface Science

Year:

2005

Language:

english

File:

PDF, 279 KB

english, 2005

9

The application of low energy ion scattering spectroscopy (LEIS) in sub 28-nm CMOS technology

Dittmar, Kornelia, Triyoso, Dina H., Erben, Elke, Metzger, Joachim, Binder, Robert, Brongersma, Hidde H., Weisheit, Martin, Engelmann, Hans-Jürgen

Journal:

Surface and Interface Analysis

Year:

2017

Language:

english

File:

PDF, 1001 KB

english, 2017

10

Analysis of Frankia populations in three soils devoid of actinorhizal plants

Liisa Maunuksela, Kornelia Zepp, Teija Koivula, Josef Zeyer, Kielo Haahtela, Dittmar Hahn

Journal:

FEMS Microbiology Ecology

Year:

1999

Language:

english

File:

PDF, 461 KB

english, 1999

11

AES and Related Techniques for Yield Improvement, Metrology and Development Support of ULSI Circuits Manufactured in ≤ 28nm CMOS Technology

Dittmar, Kornelia, Ohsiek, Susanne, Klein, Christoph, Weisheit, Martin, Lenski, Markus, Erben, Elke, Triyoso, Dina, Binder, Robert, Metzger, Joachim, Hempel, Klaus, Engelmann, Hans-Jürgen

Journal:

Microscopy and Microanalysis

Year:

2014

Language:

english

File:

PDF, 1.37 MB

english, 2014

12

Whole cell hybridization as a tool to study Frankia populations in root nodules

Dittmar Hahn, Kornelia Zepp, Josef Zeyer

Journal:

Physiologia Plantarum

Year:

1997

Language:

english

File:

PDF, 10.33 MB

english, 1997

13

ECS Transactions [ECS 217th ECS Meeting - Vancouver, Canada (April 25 - April 30, 2010)] - How to Evaluate Surface Free Energies of Dense and Ultra Low-κ Dielectrics in Pattern Structures

Oszinda, Thomas, Schaller, Matthias, Dittmar, Kornelia, Jiang, Le, Schulz, Stefan E.

Year:

2010

Language:

english

File:

PDF, 198 KB

english, 2010

14

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Extreme Ultraviolet (EUV) Lithography - Monitoring reticle molecular contamination in ASML EUV Alpha Demo Tool

La Fontaine, Bruno M., Okoroanyanwu, Uzodinma, Jiang, Aiqin, Dittmar, Kornelia, Fahr, Torsten, Laursen, Thomas, Wood, Obert, Cummings, Kevin, Holfeld, Christian, Peters, Jan-Hendrik, Gullikson, Eric,

Year:

2010

Language:

english

File:

PDF, 6.34 MB

english, 2010

15

Analysis of Frankia populations in three soils devoid of actinorhizal plants

Liisa Maunuksela, Kornelia Zepp, Teija Koivula, Josef Zeyer, Kielo Haahtela, Dittmar Hahn

Journal:

FEMS Microbiology Ecology

Year:

1999

Language:

english

File:

PDF, 464 KB

english, 1999

16

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Extreme Ultraviolet (EUV) Lithography - Analysis and characterization of contamination in EUV reticles

La Fontaine, Bruno M., Okoroanyanwu, Uzodinma, Dittmar, Kornelia, Fahr, Torsten, Wallow, Tom, La Fontaine, Bruno, Wood, Obert, Holfeld, Christian, Bubke, Karsten, Peters, Jan-Hendrik

Year:

2010

Language:

english

File:

PDF, 309 KB

english, 2010

17

Thin film analysis in microprocessor manufacturing using Auger electron spectroscopy

Kornelia Dittmar

Journal:

Surface and Interface Analysis

Year:

2004

Language:

english

File:

PDF, 278 KB

english, 2004

18

How to evaluate surface free energies of dense and ultra low-κ dielectrics in pattern structures

Thomas Oszinda, Matthias Schaller, Kornelia Dittmar, Le Jiang, Stefan E. Schulz

Journal:

Microelectronic Engineering

Year:

2011

Language:

english

File:

PDF, 622 KB

english, 2011

19

SPIE Proceedings [SPIE Photomask and NGL Mask Technology XX - Yokohama, Japan (Tuesday 16 April 2013)] Photomask and Next-Generation Lithography Mask Technology XX - Investigation of cleaning process induced CD shift at EUV mask

Nesladek, Pavel, Schunke, Florian, Rümmelin, Stefan, Dittmar, Kornelia, Kato, Kokoro

Year:

2013

Language:

english

File:

PDF, 262 KB

english, 2013

20

Einsatz physikalischer Analysemethoden zur Charakterisierung von dünnen Schichten und Grenzflächen in der Halbleiterindustrie. Application of physical analysis techniques for thin film and interface characterization in semiconductor industry

Ehrenfried Zschech, Eckhard Langer, Hans-Jürgen Engelmann, Kornelia Dittmar, Werner Blum

Journal:

Vakuum in Forschung und Praxis

Year:

2001

File:

PDF, 374 KB

2001

21

In situ analysis of introduced Frankia populations in root nodules of Alnus glutinosa grown under different water availability

Nickel, Anja, Hahn, Dittmar, Zepp, Kornelia, Zeyer, Josef

Journal:

Canadian Journal of Botany

Year:

1999

File:

PDF, 1.21 MB

1999

22

Surface enrichment of siloxanes with covalent bound ultraviolet (UV) absorber groups

Holger Friedrich, Irene Jansen, Klaus Rühlmann, Kornelia Dittmar

Journal:

Journal of Inorganic and Organometallic Polymers and Materials

Year:

1994

Language:

english

File:

PDF, 727 KB

english, 1994

23

Evaluation of a 23S rRNA Insertion as Target for the Analysis of Uncultured Frankia Populations in Root Nodules of Alders by Whole Cell Hybridization

Kornelia Zepp, Dittmar Hahn, Josef Zeyer

Journal:

Systematic and Applied Microbiology

Year:

1997

Language:

english

File:

PDF, 3.45 MB

english, 1997

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